What’s the reticle in a lithography system? Find out in this clip. Check out all our EUV systems, and the technology behind them: http://ms.spr.ly/6182wLVGO | ASML
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What’s the reticle in a lithography system? Find out in this clip. Che…
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[반도체 이야기] 웨이퍼(Wafer)와 레티클(Reticle)의 움직임 패턴 노광은 노광장비를 이용하여 레티클(Reticle)에 그려진 회로패턴을 웨이퍼에 레이저로 그려내는 작업입니다. 패턴 데이터를 가진 레티클은 축소하여 웨이퍼의 작은 부분에 레티클 이미지를 투사하는 것을 말합니다. 웨이퍼에 프린트 작업을 수행하기 위해서는, 감광액을 도포한 웨이퍼에 노광 공정을 통해 이미지를 생성한 다음, 다음 패턴을 구현해야 하는 방향으로 이동하여 다음 이미지를 프린트하게 됩니다. 이때의 웨이퍼의 정확하고 빠른 움직임을 이해하기 쉽도록 비유하자면, 찰나의 순간에 웨이퍼가 슈퍼카처럼 최대 속력으로 이동하고, 웨이퍼끝 부분에서 , 정지 180°회전 후 직진하는 과정과 같습니다. 아래 영상을 통해 보다 쉽게 이해하실 수 있습니다. *첨부 : 업계에서는 용어 사용 상, 마스크, 포토 마스크나 레티클(Reticle : 패턴원판)이라 부릅니다. 전통적으로, 마스크나 포토마스크는 광학적 축소 없이 단 한번의
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[반도체 이야기] 웨이퍼(Wafer)와 레티클(Reticle)의 움직임 패턴 노광…
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What does the reticle stage do in a High NA EUV lithography machine? | ASML
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