A virtual DOE-based process sensitivity check was performed for two tiers of channel holes in a 3D NAND device. The channel hole tilt distance, twist angle, and their sensitivities to the visible area ...
The cloud received its name due to the resemblance of a circular gap in the middle of a cloudy sky and giving the appearance of cloud streaks falling from the center. This is a rare phenomenon that ...
In a two-tier 3D NAND structure, the upper and lower channel hole profile can be different, and this combination of different profiles leads to different top-down visible areas. The visible area is ...
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